The liga process. Micromachining techniques.
نویسندگان
چکیده
منابع مشابه
Comparative evaluation of drying techniques for surface micromachining
Five different procedures commonly used to rinse and dry released microstructures are compared: evaporation drying with deionized (DI) water or methanol, sublimation drying with t-butyl alcohol orp-dichlorobenzene, and supercritical drying with COz. For objectivecomparison, identical test structures, made by the MCNC Multi-User EMS Processes (MUMPS), are used in evaluating the drying techniques...
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ژورنال
عنوان ژورنال: Journal of Photopolymer Science and Technology
سال: 1994
ISSN: 0914-9244,1349-6336
DOI: 10.2494/photopolymer.7.1